Micrometric Growth Defects of DLC Thin Films
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
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The term ‘epitaxial’ is applied to a film grown on top of the crystalline substrate in ordered fashion that atomic arrangement of the film accepts crystallographic structure of the substrate. Epitaxial growth is one of the most important techniques to fabricate various ‘state of the art’ electronic and optical devices. Modern devices require very sophisticated structure, which are composed of t...
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This chapter gives an introduction to the epitaxial growth of thin films on solid substrates. The term epitaxy refers to the growth of a crystalline layer on (epi) the surface of a crystalline substrate, where the crystallographic orientation of the substrate surface imposes a crystalline order (taxis) onto the thin film. This implies that film elements can be grown, up to a certain thickness, ...
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Filmes finos de carbono amorfo hidrogenado (a-C:H) têm sido depositados na superfície de materiais para melhorar propriedades mecânicas, ópticas e químicas. Nesse estudo, foi empregado o sistema de deposição química assistida por plasma (PECVD) para sintetizar filmes de a-C:H com fases DLC (tipo diamante) e PLC (tipo polimérico). As pressões parciais de acetileno em argônio foram variadas e as ...
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ژورنال
عنوان ژورنال: C — Journal of Carbon Research
سال: 2019
ISSN: 2311-5629
DOI: 10.3390/c5040073